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Downstream applications of electron grade gas



In industry, gaseous products at normal temperature and pressure are collectively referred to as industrial gas products. Industrial gas is the raw material of modern industry and plays an important role in economy.



It can be divided into bulk gas and special gas according to different processing processes and application fields. Bulk gases mainly include air-separated gases such as oxygen, nitrogen and argon, and synthetic gases such as acetylene and carbon dioxide. Gas purity requirements are not high, mainly used in metallurgy, petrochemical, coal chemical industry and steel. There are many kinds of special gases, mainly including high purity gas, mixed gas and so on. , mainly used in emerging industries such as electronics, photovoltaic and medical. The electronic gas used to make semiconductors is a special gas.



As an important branch of special gas, the domestic special gas (hereinafter referred to as special electronic gas) used to replace large electronic products is the integrated circuit (IC), display board (LCD, OLED), photovoltaic energy, glass fiber and cable and other electronic industry manufacturing indispensable key raw materials. They are widely used in thin film, lithography, etching, doping, vapor deposition, diffusion and other processes. Their quality has an important effect on the performance of electronic components. In China, high purity electronic-quality gases are mainly used in integrated circuits, display panels, leds and solar energy. Among them, integrated circuit and scoreboard electronic gas demand accounts for 79% of the total downstream demand.


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